CMP Retrofit Solutions

Malema LFC-7000 Series Ultrasonic Liquid Flow Controller

Malema LFC-7000 Series Ultrasonic Liquid Flow Controller
Malema's LFC-7000 Series high-performance closed-loop flow controllers are designed for use in a wide variety of liquids including DI water, harsh chemicals, and CMP polishing slurries. A typical module for high-accuracy control of ultrapure chemicals combines a Malema ultrasonic flowmeter, with accuracy rated at +/- 1% reading, with a Malema control valve. The ultrasonic flowmeter has an all PFA construction with no moving parts or seals. It sets a standard for flow measurement in terms of accuracy, repeatability, and purity.

Learn More: Malema LFC-7000 Series Ultrasonic Liquid Flow Controllers


Malema LFC-7650 Integrated Flow Control Module

Malema LFC-7650 Integrated Flow Control Module
Malema's LFC-7650 Series high-performance closed-loop flow controllers with integrated pressure transducer designed for use in a wide variety of high purity liquids including DI water and harsh chemicals. A typical module combines a Malema Sensors® ultrasonic flow meter with a Malema control valve. It sets the standard for flow measurement in terms of accuracy, repeatability, turndown, and purity.

Learn More: Malema LFC-7650 Integrated Flow Control Module

Fill out the form below to have one of our technical specialists contact you to discuss your process issues related to CMP Tools.

Process Control
A lesson for me is that I need to involve you earlier in the program.

You were tireless in your support and it will not be forgotten!

Valin Was There For Us
When we needed technical assistance and applications support, Valin was there for us. Their knowledgeable engineers saved us an invaluable amount of time, helping us get up and running quickly. We are very happy with their services.