GasPro™ TEM-900 series filters are designed for 3 nm particle retention up to flow rates of 30 slpm and temperatures up to 121ºC (250ºF).
GasPro™ TEM-900 High-Purity PTFE-316L In-Line Filter Applications
- Point-of-use semiconductor speciality gas filtration.
- Inert and speciality gas delivery.
GasPro™ TEM-900 High-Purity PTFE-316L In-Line Filter Specifications
- Construction: ePTFE membrane (9.82 cm2 / 1.5 m2), with a PTFE support structure, within a 316L stainless steel housing. Various internal o-ring materials can be selected.
- Filtration rating: Our porous ePTFE filters provide efficient 3 nm particle retention.
- Maximum operating temperature: 121°C (250°F) in inert gas.
- Maximum operating pressure: 207 bar (3000 psig) at 20°C (68°F).
GasPro™ TEM-900 High-Purity PTFE-316L In-Line Filter Features and Benefits
- Electro-polished housing - The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces.
- Out of package cleanliness - Our GasPro™ TEM-900 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional.
- 100% helium leak tested - All units are tested to 1x10-9 atm cc/second.
Download GasPro™ TEM-900 High-Purity PTFE-316L In-Line Filter Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
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