Highest-Performance All-Fluoropolymer Capsule for the Most Aggressive ApplicationsThe Fluorocap®-XL encapsulated filter cartridge is setting the new standard for exceptional fow rates and on-stream life. It utilizes a larger diameter cartridge combined with our unique SELECT pleating that increases filtration area by over 70%. This results in increased bath turnover and longer filter life to meet the demands of today’s advanced 300mm fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180 °C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which of the lowest metals extractables in the industry.
Benefits:- Extra large filtration area for longer life
- Highest flow rates for maximum bath turn over
- Wet-pack option for quick installation
- Ultraclean option for absolute cleanliness
- All-fluoropolymer for maximum chemical resistance
- 100% integrity tested for consistent quality
Applications:- Wet etch and clean
- Hot phosphoric acid
- Sulfuric acid
- Hydrofl uoric acid
- Nitric acid
- Piranha
- SC1, SC2
- NMP-based solvents
- Other high temperature or ozonated processes
Specifications:Materials of Construction100% Fluoropolymer construction. All components are thermally bonded to ensure integrity and reduce extractables.
Effective Filtration Area per 10˝ (250mm) Cartridge22.5ft2 (2.04 m2) 0.03μm
21.5ft2 (1.99 m2) 0.05μm
18.5ft2 (1.71 m2) 0.10μm
Metals Extractables*Standard: <30ppb (total)
Ultraclean: <7ppb (total)
*In a 10% HNO3 extraction
Maximum Differential
Pressure/TemperatureForward: 70psid (4.8bar) @ 75 ºF (24 °C)
Standard: 50psid (3.4bar) @ 167 ºF (75 °C)
15psid (1.0bar) @ 300 ºF (150 ºC)
Forward
HT option: 15psid (1.0bar) @ 356 ºF (180 ºC)
Reverse: 50psid (3.4bar) @ 75 ºF (24 ºC)
15psid (1.0bar) @ 250 ºF (121 ºC)
Cleanliness (particle shedding)Wet-packed: <2 particles/ml >0.2μm after 7gal @ 1gpm
TOC/Resistivity Rinse-up (wet-packed)TOC recovery within 3-5ppb of feed after 12gal @ 1gpm.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.
Download Fluorocap-XL Filter Capsule Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
online form to learn more.