Parker Fluoroflow®-HSA Cartridge

Increased Performance All-Fluoropolymer Cartridge for Aggressive Applications

The Fluoroflow®-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow®. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.

Benefits:

• Increased fltration area for longer life
• Higher fow rates for increased bath turn over
• Wet-pack option for quick installation
• Ultraclean wet-pack option for absolute cleanliness
• All-fuoropolymer for most maximum chemical resistance
• 100% integrity tested for consistent quality

Applications

• Wet etch and clean
  • Phosphoric acid
  • Sulfuric acid
  • Hydrof uoric acid
  • Nitric acid
  • Piranha – SC1,SC2
  • NMP-based solvents
• Other high temperature or ozonated processes

Specification:

Materials of Construction
100% Fluoropolymer construction
All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area
4.8ft2 (0.45 m2) 4˝ (100mm) cartridge
9.8ft2 (0.91 m2) 10˝ (250mm) cartridge

Metals Extractables*
Standard:     <20ppb (total)
Ultraclean:     <5ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature
Forward:
80psid (5.5bar) @ 75ºF (24ºC)
55psid (3.8bar) @ 167ºF (75ºC)
30psid (2.0bar) @ 257ºF (125ºC)
15psid (1.0bar) @ 300ºF (150ºC)

Forward HT option:
100psid (6.8bar) @ 75ºF (24ºC)
75psid (5.1bar) @ 167ºF (75ºC)
50psid (3.4bar) @ 257ºF (125ºC)
15psid (1.0bar) @ 356ºF (180ºC)

Reverse:
50psid (3.4bar) @ 75ºF (24ºC)
15psid (1.0bar) @ 250ºF (121ºC)

Cleanliness (particle shedding)
Wet-packed:
<2 particles/ml >0.2μm after 7gal @ 1gpm

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed without additional rinse-up.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.




Talk to one of our filtration experts today at (855) 737-4717, or fill out our online form to learn more.