Parker Fluorocap®-Select Cartridge

High Performance All-Fluoropolymer Capsule for the Most Aggressive Applications

The Fluorocap®-SELECT encapsulated filter cartridge provides exceptional flow rates and on-stream life. It utilizes our unique SELECT pleating that increases filtration area and flow by over 25% compared to our standard Fluorocap®. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.


Benefits:
  • Large filtration area for longer life
  • High fow rates for maximum bath turn over
  • Wet-pack option for quick installation
  • Ultraclean option for absolute cleanliness
  • All-fuoropolymer for maximum chemical resistance
  • 100% integrity tested for consistent quality

Applications:
  • Wet etch and clean
    • Hot phosphoric acid
    • Sulfuric acid
    • Hydrof uoric acid
    • Nitric acid
    • Piranha – SC1,SC2
    • NMP-based solvents
  • Other high temperature or ozonated processes

Specifications:

Materials of Construction
100% Fluoropolymer construction. All components are thermally bonded to ensure integrity and reduce extractables.

Effective Filtration Area
12.2 ft2 (1.1m2) per 10˝ (250mm) for 0.03 & 0.05μm
11.4 ft2 (1.0m2) per 10˝ (250mm) for other ratings

Metals Extractables*
Standard:     <20ppb (total)
Ultraclean:     <5ppb (total)
*In a 10% HNO3 extraction

Maximum Differential
Pressure/Temperature

Forward:      80psid (5.5bar) @ 75°F (24°C)
Standard:     55psid (3.8bar) @ 167°F (75°C)
                    30psid (2.0bar) @ 257°F 125°C)
                    15psid (1.0bar) @ 300°F 150°C)

Forward HT Option:
100psid (6.8bar) @ 75°F (24°C)
75psid (5.1bar) @ 167°F (75°C)

Reverse:     50psid (3.4bar) @ 75°F (24°C)
                  15psid (1.0bar) @ 250°F (121°C)

Cleanliness (particle shedding)
Wet-packed:     2 particles/ml >0.2μm after 7gal @ 1gpm

TOC/Resistivity Rinse-up (wet-packed)
TOC recovery within 3-5ppb of feed after 12gal @ 1gpm.
Resistivity recovery within 0.4megohm-cm of feed after 22gal @ 1gpm.


Download Fluorocap-Select Cartridge Datasheet


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