GasPro™ TEM-400 series filters are designed for 3 nm particle retention up to flow rates of 75 scfm and temperatures up to 80ºC (176ºF).
An ePTFE membrane (0.21 m2 / 2.3 ft2) with a polypropylene support structure is enclosed within a stainless steel 316L housing for excellent flow and chemical resistance. A standard Viton® o-ring is used (other o-ring materials available on resuest).
GasPro™ TEM-400 High Flow ePTFE In-Line Filter Applications
- General and process inert facilities gases for semiconductor, flat panel display and other highpurity applications.
- Clean-dry air for critical metrology, inspection and lithography applications.
GasPro™ TEM-400 High Flow ePTFE In-Line Filter Specifications
- Filtration rating - Our porous ePTFE filters provide efficient particle retention 3 nm.
- Maximum operating temperature*
- 80°C (176°F).
- Recommended changeout: 6 months when operating above 69ºC (156ºF).
- Maximum operating pressure
- 17.2 bar (250 psig) @ 20°C (68°F).
- Maximum forward flow differential pressure
- 20ºC (68ºF): 6.0 bar (87 psi)
- 80ºC (176ºF): 4.0 bar (58 psi)
GasPro™ TEM-400 High Flow ePTFE In-Line Filter Features and Benefits
- Electro-polished housing - The filter assemblies have a 15Ra electro-polished 316L stainless steel housing to prevent corrosion and particle build up on interior surfaces.
- Out of package cleanliness - Our GasPro™ TEM-400 filters are cleaned and packaged in a cleanroom with organic free handling for out-of-package, particle free, and chemical free cleanliness. Final assembly is purged with filtered nitrogen for initial cleanliness. Additional preconditioning is optional.
- Multiple fitting options for ease of installation - Standard fitting options include face/gasket seal, compression, butt weld and NPT. Special fittings, including tri-clamp (clover) sanitary and flange type, may be available upon request.
- 100% helium leak tested - All units are tested to 1x10-9 atm cc/second.
Download GasPro™ TEM-400 High Flow ePTFE In-Line Filter Datasheet Talk to one of our filtration experts today at
(855) 737-4717, or fill out our
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