Parker Veriflo's FRN1000 Series pressure reducing regulator provides precise control of process gas resulting in a stable flow and pressure supply to downstream systems making it an excellent choice for general point of use semiconductor manufacturing gas applications.
The standard Hastelloy C-22® diaphragm and integrated filtration promotes long life performance while the metal-to-metal diaphragm seal assures high leak integrity.
FRN1000 Series Regulator Features:
- 316L stainless steel body
- Metal-to-metal diaphragm seal standard
- High purity cleaned
- Inlet pressures up to 3500 psig
- Passivated
- Hastelloy® diaphragm standard
- Flows up to 200 slpm
- Integrated filtration
FRN1000 Series Regulator Markets:
- Semiconductor Manufacturing
- Gas Companies
- Analytical Laboratory
- Industrial
- Pharmaceutical
- BioPharm
Applications:
- Tool Hook Up
- Valve Manifold Boxes
- Process Gas Cabinets
- "Point of Use" Pressure Regulation
Download Parker Veriflo's FRN1000 Series Single Stage Pressure Reducing Regulator Datasheet Talk to one of our experts today at (855) 737-4714, or fill out our online form to learn more.